دستگاه لایه نشانی زیگورات  رومیزی

Ziggurat magnetron sputter coater

 

18 دستگاه اسپاترینگ دریک سیستم مجتمع

 

G0

DC-MSC)- DC Magnetron Sputter Coater)

      DCMSC+DCB)- DC Magnetron Sputter Coater+DC Bias)

G1

ULP-RPMSC)- Unipolar Low Power Real Pulse Magnetron Sputter Coater)

BLP-RPMSC)-  Bipolar   Low Power Real Pulse Magnetron Sputter Coater)

G2:

ULP-PMSC)- Unipolar Low Power Pulse Magnetron Sputter Coater)

 BLP-PMSC)-  Bipolar   Low Power Pulse Magnetron Sputter Coater)

G3:

ULP-MRPPF)-   Unipolar Low Power Madulated Real Pulse Power based on Frequenc )

ULP-MRPPD)-   Unipolar Low Power Madulated Real Pulse Power based on Duty cycle )

ULP-MRPPFD)- Unipolar Low Power Madulated Real Pulse Power based on Frequency and Duty cycle )

G4:

 BLP–MRPPF)-     Bipolar Low Power Madulated Real Pulse Power based on Frequency )

 BLP–MRPPD)-    Bipolar Low Power Madulated Real Pulse Power based on Duty cycle )

 BLP–MRPPFD)-   BIipolar Low Power Madulated Real Pulse Power based on Frequency and Duty cycle )

G5:

 ULP-MPPF)-  Unipolar Low Power Madulated Pulse Power based on Frequency )

ULP-MPPD)-  Unipolar Low Power Madulated Pulse Power based on Duty cycle )

 ULP-MPPFD)- Unipolar Low Power Madulated Pulse Power based on Frequency and Duty cycle )

G6:

 LP-MPPF+DCB)-  Low Power Madulated Pulse Power based on Frequency + DC Bias )

LP-MPPD+DCB)-  Low Power Madulated Pulse Power based on Duty cycle +DC Bias )

 LP-MPPFD+DCB)- Low Power Madulated Pulse Power based on Frequency and Duty+DC Bias )

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