November 22, 2018

Ziggurat magnetron sputter coater- Eighteen systems in one

Ziggurat magnetron sputter coater

 Ziggurat + magnetron sputter coater- Eighteen systems in one

Sputtering Task Modes for deposition layer process in seven groups are:

 

G0

(DC-MSC)- DC Magnetron Sputter Coater

(DCMSC+DCB)- DC Magnetron Sputter Coater+DC Bias

G1

(ULP-RPMSC)- Unipolar Low Power Real Pulse Magnetron Sputter Coater

(BLP-RPMSC)-  Bipolar   Low Power Real Pulse Magnetron Sputter Coater

G2:

(ULP-PMSC)- Unipolar Low Power Pulse Magnetron Sputter Coater

 (BLP-PMSC)-  Bipolar   Low Power Pulse Magnetron Sputter Coater

G3:

(ULP-MRPPF)-   Unipolar Low Power Madulated Real Pulse Power based on Frequenc

(ULP-MRPPD)-   Unipolar Low Power Madulated Real Pulse Power based on Duty cycle

(ULP-MRPPFD)- Unipolar Low Power Madulated Real Pulse Power based on Frequency and Duty cycle

G4:

(BLP–MRPPF)-     Bipolar Low Power Madulated Real Pulse Power based on Frequency

 (BLP–MRPPD)-    Bipolar Low Power Madulated Real Pulse Power based on Duty cycle

 (BLP–MRPPFD)-   BIipolar Low Power Madulated Real Pulse Power based on Frequency and Duty cycle

G5:

 (ULP-MPPF)-  Unipolar Low Power Madulated Pulse Power based on Frequency

(ULP-MPPD)-  Unipolar Low Power Madulated Pulse Power based on Duty cycle

 (ULP-MPPFD)- Unipolar Low Power Madulated Pulse Power based on Frequency and Duty cycle

G6:

 (LP-MPPF+DCB)-  Low Power Madulated Pulse Power based on Frequency + DC Bias

(LP-MPPD+DCB)-  Low Power Madulated Pulse Power based on Duty cycle +DC Bias

 (LP-MPPFD+DCB)- Low Power Madulated Pulse Power based on Frequency and Duty+DC Bias

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