Ziggurat magnetron sputter coater
Ziggurat + magnetron sputter coater- Eighteen systems in one
Sputtering Task Modes for deposition layer process in seven groups are:
G0
(DC-MSC)- DC Magnetron Sputter Coater
(DCMSC+DCB)- DC Magnetron Sputter Coater+DC Bias
G1
(ULP-RPMSC)- Unipolar Low Power Real Pulse Magnetron Sputter Coater
(BLP-RPMSC)- Bipolar Low Power Real Pulse Magnetron Sputter Coater
G2:
(ULP-PMSC)- Unipolar Low Power Pulse Magnetron Sputter Coater
(BLP-PMSC)- Bipolar Low Power Pulse Magnetron Sputter Coater
G3:
(ULP-MRPPF)- Unipolar Low Power Madulated Real Pulse Power based on Frequenc
(ULP-MRPPD)- Unipolar Low Power Madulated Real Pulse Power based on Duty cycle
(ULP-MRPPFD)- Unipolar Low Power Madulated Real Pulse Power based on Frequency and Duty cycle
G4:
(BLP–MRPPF)- Bipolar Low Power Madulated Real Pulse Power based on Frequency
(BLP–MRPPD)- Bipolar Low Power Madulated Real Pulse Power based on Duty cycle
(BLP–MRPPFD)- BIipolar Low Power Madulated Real Pulse Power based on Frequency and Duty cycle
G5:
(ULP-MPPF)- Unipolar Low Power Madulated Pulse Power based on Frequency
(ULP-MPPD)- Unipolar Low Power Madulated Pulse Power based on Duty cycle
(ULP-MPPFD)- Unipolar Low Power Madulated Pulse Power based on Frequency and Duty cycle
G6:
(LP-MPPF+DCB)- Low Power Madulated Pulse Power based on Frequency + DC Bias
(LP-MPPD+DCB)- Low Power Madulated Pulse Power based on Duty cycle +DC Bias
(LP-MPPFD+DCB)- Low Power Madulated Pulse Power based on Frequency and Duty+DC Bias
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