دستگاه لایه نشانی زیگورات X  رومیزی

 

(G0-I (Current Control Mode

DC-I-MSC)- DC Magnetron Sputter Coater)

DC-I-MSC+DCB)- DC Magnetron Sputter Coater+DC Bias)

(G1-V (Voltage Control Mode

DC-V-MSC)- DC Magnetron Sputter Coater)

 DC-V-MSC+DCB)- DC Magnetron Sputter Coater+DC Bias)

( G2-I (Current Control Mode U&B Low Power Real Pulse

ULP-I-RPMSC)- Unipolar Low Power Real Pulse Magnetron Sputter Coater)

BLP-I-RPMSC)- Asymmetric Bipolar   Low Power Real Pulse Magnetron Sputter Coater)

(G3-V (Voltage Control Mode U&B Low Power Real Pulse

ULP-V-RPMSC)- Unipolar Low Power Real Pulse Magnetron Sputter Coater)

BLP-V-RPMSC)-  Asymmetric Bipolar   Low Power Real Pulse Magnetron Sputter Coater)

(G4-I (Current Control Mode U&B Low Power  Pulse

ULP-I-PMSC)- Unipolar Low Power Pulse Magnetron Sputter Coater)

 BLP-I-PMSC)-  Asymmetric Bipolar   Low Power Pulse Magnetron Sputter Coater)

(G5-V (Voltage Control Mode U&B Low Power Pulse

ULP-V-PMSC)- Unipolar Low Power Pulse Magnetron Sputter Coater)

 BLP-V-PMSC)-  Asymmetric Bipolar   Low Power Pulse Magnetron Sputter Coater)

(G6-I (Unipolar Low Power Madulated Real Pulse Current

ULP-MRPCFL)-   Unipolar Low Power Madulated Real Pulse Current based on Frequency)

ULP-MRPCFH)-   Unipolar Low Power Madulated Real Pulse Current based on  Frequency)

ULP-MRPCDL)-   Unipolar Low Power Madulated Real Pulse Current based on Duty cycle)

ULP-MRPCDH)-   Unipolar Low Power Madulated Real Pulse Current based on Duty cycle)

ULP-MRPCFDL)- Unipolar Low Power Madulated Real Pulse Current based on Frequency and Duty cycle)

ULP-MRPCFDH)- Unipolar Low Power Madulated Real Pulse Current based on Frequency and Duty cycle)

(G7-V (Unipolar Low Power Madulated Real Pulse Voltage

ULP-MRPVFL)-   Unipolar Low Power Madulated Real Pulse Voltage based on Frequency)

ULP-MRPVFH)-   Unipolar Low Power Madulated Real Pulse Voltage based on  Frequency)

ULP-MRPVDL)-   Unipolar Low Power Madulated Real Pulse Voltage based on Duty cycle)

ULP-MRPVDH)-   Unipolar Low Power Madulated Real Pulse Voltage based on Duty cycle)

ULP-MRPVFDL)- Unipolar Low Power Madulated Real Pulse Voltage based on Frequency and Duty cycle)

ULP-MRPVFDH)- Unipolar Low Power Madulated Real Pulse Voltage based on Frequency and Duty cycle)

(G8-I (Bipolar Low Power Madulated Real Pulse Current

 BLP–MRPCFL)-     Asymmetric Bipolar Low Power Madulated Real Pulse Current based on Frequency)

BLP–MRPCFH)-     Asymmetric Bipolar Low Power Madulated Real Pulse Current based on Frequency)

BLP–MRPCDL)-     Asymmetric Bipolar Low Power Madulated Real Pulse Current based on Duty cycle)

 BLP–MRPCDH)-    Asymmetric Bipolar Low Power Madulated Real Pulse Current based on Duty cycle)

 BLP–MRPCFDL)-   Asymmetric Bipolar Low Power Madulated Real Pulse Current based on Frequency and Duty cycle)

 BLP–MRPCFDH)-   Asymmetric Bipolar Low Power Madulated Real Pulse Current based on Frequency and Duty cycle)

(G9-V (Bipolar Low Power Madulated Real Pulse Voltage

 BLP–MRPVFL)-     Asymmetric Bipolar Low Power Madulated Real Pulse Voltage based on Frequency)

BLP–MRPVFH)-     Asymmetric Bipolar Low Power Madulated Real Pulse Voltage  based on Frequency)

BLP–MRPVDL)-     Asymmetric Bipolar Low Power Madulated Real Pulse Voltage based on Duty cycle)

 BLP–MRPVDH)-    Asymmetric Bipolar Low Power Madulated Real Pulse Voltage based on Duty cycle)

BLP–MRPVFDL)-  Asymmetric Bipolar Low Power Madulated Real Pulse Voltage based on Frequency and Duty cycle)

 BLP–MRPVFDH)-   Asymmetric Bipolar Low Power Madulated Real Pulse Voltage based on Frequency and Duty cycle)

(G10-I (Unipolar Low Power Madulated Pulse Current

ULP-MPCFL)-  Unipolar Low Power Madulated Pulse Current based on Frequency)

ULP-MPCFH)-  Unipolar Low Power Madulated Pulse Current based on Frequency)

ULP-MPCDL)-  Unipolar Low Power Madulated Pulse Current based on Duty cycle)

ULP-MPCDH)-  Unipolar Low Power Madulated Pulse Current based on Duty cycle)

ULP-MPCFDL)- Unipolar Low Power Madulated Pulse Current based on Frequency and Duty cycle)

 ULP-MPCFDH)- Unipolar Low Power Madulated Pulse Current based on Frequency and Duty cycle)

(G11-V (Unipolar Low Power Madulated Pulse Voltage

ULP-MPVFL)-  Unipolar Low Power Madulated Pulse Voltage based on Frequency)

ULP-MPVFH)-  Unipolar Low Power Madulated Pulse Voltage based on Frequency)

ULP-MPVDL)-  Unipolar Low Power Madulated Pulse Voltage based on Duty cycle)

ULP-MPVDH)-  Unipolar Low Power Madulated Pulse Voltage based on Duty cycle)

 ULP-MPVFDL)- Unipolar Low Power Madulated Pulse Voltage based on Frequency and Duty cycle)

 ULP-MPVFDH)- Unipolar Low Power Madulated Pulse Voltage based on Frequency and Duty cycle)

(G12-I (Low Power Madulated Pulse Current

 BLP-MPPFL)-  Asymmetric Bipolar Low Power Madulated Pulse Current based on Frequency )

BLP-MPPFH)-  Asymmetric Bipolar Low Power Madulated Pulse Current based on Frequency )

BLP-MPPDL)-  Asymmetric Bipolar Low Power Madulated Pulse Current based on Duty cycle )

BLP-MPPDH)-  Asymmetric Bipolar Low Power Madulated Pulse Current based on Duty cycle +DC Bias)

 BLP-MPPFDL)- Asymmetric Bipolar Low Power Madulated Pulse Current based on Frequency and Duty+DC Bias)

 BLP-MPPFDH)- Asymmetric Bipolar Low Power Madulated Pulse Current based on Frequency and Duty+DC Bias)

 (G13-V (Low Power Madulated Pulse Voltage

 BLP-MPVFL)-  Asymmetric Bipolar Low Power Madulated Pulse Voltage based on Frequency )

BLP-MPVFH)-  Asymmetric Bipolar Low Power Madulated Pulse Voltage based on Frequency )

BLP-MPVDL)-  Asymmetric Bipolar Low Power Madulated Pulse Voltage based on Duty cycle )

BLP-MPVDH)-  Asymmetric Bipolar Low Power Madulated Pulse Voltage based on Duty cycle )

 BLP-MPVFDL)- Asymmetric Bipolar Low Power Madulated Pulse Voltage based on Frequency and Duty)

 BLP-MPVFDH)- Asymmetric Bipolar Low Power Madulated Pulse Voltage based on Frequency and Duty)

(G14-I (Unipolar Low Power Madulated Current Real Pulse Pack

 ULP–MCRPPFL)-     Unipolar Low Power Madulated Current Real Pulse Pack based on Frequency)

ULP–MCRPPFH)-     Unipolar Low Power Madulated Current Real Pulse Pack based on Frequency)

ULP–MCRPPDL)-     Unipolar Low Power Madulated Current Real Pulse Pack based on Duty cycle)

 ULP–MCRPPDH)-    Unipolar Low Power Madulated Current Real Pulse Pack based on Duty cycle)

ULP–MCRPPFDL)-   Unipolar Low Power Madulated Current Real Pulse Pack based on Frequency and Duty)

ULP–MCRPPFDH)-  Unipolar Low Power Madulated Current Real Pulse Pack based on Frequency and Duty)

(G15-V (Unipolar Low Power Madulated Voltage Real Pulse Pack

 ULP–MVRPPFL)-     Unipolar Low Power Madulated Voltage Real Pulse Pack based on Frequency)

 ULP–MVRPPFH)-     Unipolar Low Power Madulated Voltage Real Pulse Pack  based on Frequency)

ULP–MVRPPDL)-     Unipolar Low Power Madulated Voltage Real Pulse Pack based on Duty cycle)

ULP–MVRPPDH)-    Unipolar Low Power Madulated Voltage Real Pulse Pack based on Duty cycle)

ULP–MVRPPFDL)-  Unipolar Low Power Madulated Voltage Real Pulse Pack based on Frequency and Duty)

ULP–MVRPPFDH)-   Unipolar Low Power Madulated Voltage Real Pulse Pack based on Frequency and Duty)

(G16-I (Bipolar Low Power Madulated Current Real Pulse Pack

BLP–MCRPPFL)-     Asymmetric Bipolar Low Power Madulated Current Real Pulse Pack based on Frequency)

 BLP–MCRPPFH)-     Asymmetric Bipolar Low Power Madulated Current Real Pulse Pack based on Frequency)

BLP–MCRPPDL)-     Asymmetric Bipolar Low Power Madulated Current Real Pulse Pack based on Duty cycle)

BLP–MCRPPDH)-    Asymmetric Bipolar Low Power Madulated Current Real Pulse Pack based on Duty cycle)

BLP–MCRPPFDL)-   Asymmetric Bipolar Low Power Madulated Current Real Pulse Pack based on Frequency and Duty)

BLP–MCRPPFDH)-   Asymmetric BIipolar Low Power Madulated Current Real Pulse Pack based on Frequency and Duty)

(G17-V (Bipolar Low Power Madulated Voltage Real Pulse Pack

BLP–MVRPPFL)-     Asymmetric Bipolar Low Power Madulated Voltage Real Pulse Pack based on Frequency)

BLP–MVRPPFH)-     Asymmetric Bipolar Low Power Madulated Voltage Real Pulse Pack  based on Frequency)

BLP–MVRPPDL)-     Asymmetric Bipolar Low Power Madulated Voltage Real Pulse Pack based on Duty cycle)

 BLP–MVRPPDH)-    Asymmetric Bipolar Low Power Madulated Voltage Real Pulse Pack based on Duty cycle)

BLP–MVRPPFDL)-   Asymmetric Bipolar Low Power Madulated Voltage Real Pulse Pack based on Frequency and Duty)

BLP–MVRPPFDH)-  Asymmetric Bipolar Low Power Madulated Voltage Real Pulse Pack based on Frequency and Duty )

(G18-I (Unipolar Low Power Madulated Current Pulse Pack

LP-MCPPFL)-  Unipolar Low Power Madulated Current Pulse Pack based on Frequency)

LP-MCPPFH)-  Unipolar Low Power Madulated Current Pulse Pack based on Frequency)

LP-MCPPDL)-  Unipolar Low Power Madulated Current Pulse Pack based on Duty cycle)

LP-MCPPDH)-  Unipolar Low Power Madulated Current Pulse Pack based on Duty cycle)

 LP-MCPPFDL)- Unipolar Low Power Madulated Current Pulse Pack based on Frequency and Duty )

 LP-MCPPFDH)- Unipolar Low Power Madulated Current Pulse Pack based on Frequency and Duty)

 (G19-V (Unipolar Low Power Madulated Voltage Pulse Pack

 LP-MVPPFL)-  Unipolar Low Power Madulated Voltage Pulse Pack based on Frequency  )

LP-MVPPFH)-  Unipolar Low Power Madulated Voltage Pulse Pack based on Frequency  )

LP-MVPPDL)-  Unipolar Low Power Madulated Voltage Pulse Pack based on Duty cycle  )

LP-MVPPDH)-  Unipolar Low Power Madulated Voltage Pulse Pack based on Duty cycle  )

LP-MVPPFDL)- Unipolar Low Power Madulated Voltage Pulse Pack based on Frequency and Duty )

LP-MVPPFDH)- Unipolar Low Power Madulated Voltage Pulse Pack based on Frequency and Duty )

(G20-I (BIipolar Low Power Madulated Current Pulse Pack

BLP-MCPPFL)-  Asymmetric Bipolar Low Power Madulated Current Pulse Pack based on Frequency )

BLP-MCPPFH)-  Asymmetric Bipolar Low Power Madulated Current Pulse Pack based on Frequency )

BLP-MCPPDL)-  Asymmetric Bipolar Low Power Madulated Current Pulse Pack based on Duty cycle )

BLP-MCPPDH)-  Asymmetric Bipolar Low Power Madulated Current Pulse Pack based on Duty cycle )

 BLP-MCPPFDL)- Asymmetric Bipolar Low Power Madulated Current Pulse Pack based on Frequency and Duty)

 BLP-MCPPFDH)- Asymmetric Bipolar Low Power Madulated Current Pulse Pack based on Frequency and Duty)

 (G21-V ( BIipolar Low Power Madulated Voltage Pulse Pack

 BLP-MVPPFL)-  Asymmetric Bipolar Low Power Madulated Voltage Pulse Pack based on Frequency )

BLP-MVPPFH)-  Asymmetric Bipolar Low Power Madulated Voltage Pulse Pack based on Frequency )

BLP-MVPPDL)-  Asymmetric Bipolar  Low Power Madulated Voltage Pulse Pack based on Duty cycle )

BLP-MVPPDH)-  Asymmetric Bipolar Low Power Madulated Voltage Pulse Pack based on Duty cycle )

 BLP-MVPPFDL)- Asymmetric Bipolar Low Power Madulated Voltage Pulse Pack based on Frequency and Duty)

 BLP-MVPPFDH)- Asymmetric Bipolar Low Power Madulated Voltage Pulse Pack based on Frequency and Duty)

 

 

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