آگوست 26, 2019

دستگاه دو کاتد DC و پالسی متقارن 36 حالت+(108*108 حالت ترکیبی)

دستگاه مستقیم و پالسی  دو کاتد در36 مد دستگاه متقارن  +  ترکیب 108 مد کاری کاتد اول  *  108 مد کاری کاتد دوم در یک سیستم مجتمع

دستگاه لایه نشانی زیگورات متقارن دو کاتد 2X  رومیزی

Ziggurat 2X magnetron sputter coater

108 مد اسپاترینگ  کاتد اول در 22 گروه  زیگورات x

108 مد اسپاترینگ  کاتد دوم در 22 گروه زیگورات X 

ترکیب 108 مد اسپاترینگ  کاتد اول با کنترل مجزا  *  108 مد اسپاترینگ  کاتد دوم با کنترل مجزا

36 مد اسپاترینگ دو کاتد متقارن دریک سیستم مجتمع در 12 گروه

 مدهای کاری دوکاتد متقارن اسپاترینگ زیگورات 2X رو میزی جهت فرآیند لایه نشانی در 12 گروه عبارتند از:

 ( G0-I (Current Control Mode Symmetric  Bipolar Low Power Real Pulse

BLP-I-RPF)-  Symmetric  Bipolar   Low Power Real Pulse With Adjustable Frequency)

BLP-I-RPD)-  Symmetric  Bipolar   Low Power Real Pulse With Adjustable Duty cycle)

BLP-I-RPFD)- Symmetric  Bipolar   Low Power Real Pulse With Adjustable Frequency and Duty cycle)

(G1-V (Voltage Control Mode Symmetric  Bipolar Low Power Real Pulse

BLP-V-RPF)-  Symmetric  Bipolar   Low Power Real Pulse With Adjustable Frequency)

BLP-V-RPD)-  Symmetric  Bipolar   Low Power Real Pulse With Adjustable Duty cycle)

BLP-V-RPFD)- Symmetric  Bipolar  Low Power Real Pulse With Adjustable Frequency and Duty cycle)

(G2-I (Current Control Mode Symmetric  Bipolar Low Power  Pulse

 BLP-I-PF)-   Symmetric  Bipolar   Low Power Pulse With Adjustable Frequency)

BLP-I-PD)-   Symmetric  Bipolar   Low Power Pulse With Adjustable Duty cycle)

  BLP-I-PFD)- Symmetric  Bipolar   Low Power Pulse With Adjustable Frequency and Duty cycle)

(G3-V (Voltage Control Mode Symmetric  Bipolar Low Power Pulse

 BLP-V-PF)-   Symmetric  Bipolar   Low Power Pulse With Adjustable Frequency)

BLP-V-PD)-   Symmetric  Bipolar   Low Power Pulse With Adjustable Duty cycle)

  BLP-V-PFD)- Symmetric  Bipolar   Low Power Pulse With Adjustable Frequency and Duty cycle)

(G4-I (Symmetric  Bipolar Low Power Madulated Real Pulse Current

BLP-I-MRPCF)-   Symmetric  Bipolar   Low Power Madulated Real Pulse Current based on Frequency)

BLP-I-MRPCD)-   Symmetric  Bipolar   Low Power Madulated Real Pulse Current based on Duty cycle)

BLP-I-MRPCFD)- Symmetric  Bipolar   Low Power Madulated Real Pulse Current based on Frequency and Duty cycle)

(G5-V (Symmetric  Bipolar Low Power Madulated Real Pulse Voltage

BLP-V-MRPVF)-  Symmetric  Bipolar Low Power Madulated Real Pulse Voltage based on Frequency)

BLP-V-MRPVD)-  Symmetric  Bipolar Low Power Madulated Real Pulse Voltage based on Duty cycle)

BLP-V-MRPVFD)- Symmetric  Bipolar Low Power Madulated Real Pulse Voltage based on Frequency and Duty cycle)

((G6-I (Symmetric  Bipolar Low Power Madulated Pulse Current

BLP-I-MPCFL)-  Symmetric  Bipolar Low Power Madulated Pulse Current based on Frequency)

BLPI–MPCDL)-  Symmetric  Bipolar Low Power Madulated Pulse Current based on Duty cycle)

BLP-I-MPCFDL)- Symmetric  Bipolar Low Power Madulated Pulse Current based on Frequency and Duty cycle)

 (G7-V (Symmetric  Bipolar Low Power Madulated Pulse Voltage

BLP-V-MPVF)-  Symmetric  Bipolar Low Power Madulated Pulse Voltage based on Frequency)

BLP-V-MPVD)-  Symmetric  Bipolar Low Power Madulated Pulse Voltage based on Duty cycle)

 BLP-V-MPVFD)- Symmetric  Bipolar Low Power Madulated Pulse Voltage based on Frequency and Duty cycle)

 ((G8-I (Symmetric  Bipolar Low Power Madulated Current Real Pulse Pack

 BLP–MCRPPF)-    Symmetric  Bipolar Low Power Madulated Current Real Pulse Pack based on Frequency)

BLP–MCRPPD)-    Symmetric  Bipolar Low Power Madulated Current Real Pulse Pack based on Duty cycle)

BLP–MCRPPFD)-  Symmetric  Bipolar Low Power Madulated Current Real Pulse Pack based on Frequency and Duty)

(G9-V (Symmetric  Bipolar Low Power Madulated Voltage Real Pulse Pack

 BLP–MVRPPF)-    Symmetric  Bipolar Low Power Madulated Voltage Real Pulse Pack based on Frequency)

BLP–MVRPPD)-    Symmetric  Bipolar Low Power Madulated Voltage Real Pulse Pack based on Duty cycle)

BLP–MVRPPFD)-  Symmetric  Bipolar Low Power Madulated Voltage Real Pulse Pack based on Frequency and Duty)

(G10-I (BIipolar Low Power Madulated Current Pulse Pack

BLP-I-MCPPF)-  Symmetric  BIipolar Low Power Madulated Current Pulse Pack based on Frequency )

BLP-I-MCPPD)-  Symmetric  BIipolar Low Power Madulated Current Pulse Pack based on Duty cycle )

 BLP-I-MCPPFD)- Symmetric  BIipolar Low Power Madulated Current Pulse Pack based on Frequency and Duty)

 (G11-V ( Symmetric  BIipolar Low Power Madulated Voltage Pulse Pack

 BLP-MVPPF)-  Symmetric  BIipolar Low Power Madulated Voltage Pulse Pack based on Frequency )

BLP-MVPPD)-  Symmetric  BIipolar  Low Power Madulated Voltage Pulse Pack based on Duty cycle )

BLP-MVPPFD)- Symmetric  BIipolar Low Power Madulated Voltage Pulse Pack based on Frequency and Duty)