دستگاه مستقیم و پالسی دو کاتد در36 مد دستگاه متقارن + ترکیب 108 مد کاری کاتد اول * 108 مد کاری کاتد دوم در یک سیستم مجتمع
دستگاه لایه نشانی زیگورات متقارن دو کاتد 2X رومیزی
Ziggurat 2X magnetron sputter coater
108 مد اسپاترینگ کاتد اول در 22 گروه زیگورات x
108 مد اسپاترینگ کاتد دوم در 22 گروه زیگورات X
ترکیب 108 مد اسپاترینگ کاتد اول با کنترل مجزا * 108 مد اسپاترینگ کاتد دوم با کنترل مجزا
36 مد اسپاترینگ دو کاتد متقارن دریک سیستم مجتمع در 12 گروه
مدهای کاری دوکاتد متقارن اسپاترینگ زیگورات 2X رو میزی جهت فرآیند لایه نشانی در 12 گروه عبارتند از:
( G0-I (Current Control Mode Symmetric Bipolar Low Power Real Pulse
BLP-I-RPF)- Symmetric Bipolar Low Power Real Pulse With Adjustable Frequency)
BLP-I-RPD)- Symmetric Bipolar Low Power Real Pulse With Adjustable Duty cycle)
BLP-I-RPFD)- Symmetric Bipolar Low Power Real Pulse With Adjustable Frequency and Duty cycle)
(G1-V (Voltage Control Mode Symmetric Bipolar Low Power Real Pulse
BLP-V-RPF)- Symmetric Bipolar Low Power Real Pulse With Adjustable Frequency)
BLP-V-RPD)- Symmetric Bipolar Low Power Real Pulse With Adjustable Duty cycle)
BLP-V-RPFD)- Symmetric Bipolar Low Power Real Pulse With Adjustable Frequency and Duty cycle)
(G2-I (Current Control Mode Symmetric Bipolar Low Power Pulse
BLP-I-PF)- Symmetric Bipolar Low Power Pulse With Adjustable Frequency)
BLP-I-PD)- Symmetric Bipolar Low Power Pulse With Adjustable Duty cycle)
BLP-I-PFD)- Symmetric Bipolar Low Power Pulse With Adjustable Frequency and Duty cycle)
(G3-V (Voltage Control Mode Symmetric Bipolar Low Power Pulse
BLP-V-PF)- Symmetric Bipolar Low Power Pulse With Adjustable Frequency)
BLP-V-PD)- Symmetric Bipolar Low Power Pulse With Adjustable Duty cycle)
BLP-V-PFD)- Symmetric Bipolar Low Power Pulse With Adjustable Frequency and Duty cycle)
(G4-I (Symmetric Bipolar Low Power Madulated Real Pulse Current
BLP-I-MRPCF)- Symmetric Bipolar Low Power Madulated Real Pulse Current based on Frequency)
BLP-I-MRPCD)- Symmetric Bipolar Low Power Madulated Real Pulse Current based on Duty cycle)
BLP-I-MRPCFD)- Symmetric Bipolar Low Power Madulated Real Pulse Current based on Frequency and Duty cycle)
(G5-V (Symmetric Bipolar Low Power Madulated Real Pulse Voltage
BLP-V-MRPVF)- Symmetric Bipolar Low Power Madulated Real Pulse Voltage based on Frequency)
BLP-V-MRPVD)- Symmetric Bipolar Low Power Madulated Real Pulse Voltage based on Duty cycle)
BLP-V-MRPVFD)- Symmetric Bipolar Low Power Madulated Real Pulse Voltage based on Frequency and Duty cycle)
((G6-I (Symmetric Bipolar Low Power Madulated Pulse Current
BLP-I-MPCFL)- Symmetric Bipolar Low Power Madulated Pulse Current based on Frequency)
BLPI–MPCDL)- Symmetric Bipolar Low Power Madulated Pulse Current based on Duty cycle)
BLP-I-MPCFDL)- Symmetric Bipolar Low Power Madulated Pulse Current based on Frequency and Duty cycle)
(G7-V (Symmetric Bipolar Low Power Madulated Pulse Voltage
BLP-V-MPVF)- Symmetric Bipolar Low Power Madulated Pulse Voltage based on Frequency)
BLP-V-MPVD)- Symmetric Bipolar Low Power Madulated Pulse Voltage based on Duty cycle)
BLP-V-MPVFD)- Symmetric Bipolar Low Power Madulated Pulse Voltage based on Frequency and Duty cycle)
((G8-I (Symmetric Bipolar Low Power Madulated Current Real Pulse Pack
BLP–MCRPPF)- Symmetric Bipolar Low Power Madulated Current Real Pulse Pack based on Frequency)
BLP–MCRPPD)- Symmetric Bipolar Low Power Madulated Current Real Pulse Pack based on Duty cycle)
BLP–MCRPPFD)- Symmetric Bipolar Low Power Madulated Current Real Pulse Pack based on Frequency and Duty)
(G9-V (Symmetric Bipolar Low Power Madulated Voltage Real Pulse Pack
BLP–MVRPPF)- Symmetric Bipolar Low Power Madulated Voltage Real Pulse Pack based on Frequency)
BLP–MVRPPD)- Symmetric Bipolar Low Power Madulated Voltage Real Pulse Pack based on Duty cycle)
BLP–MVRPPFD)- Symmetric Bipolar Low Power Madulated Voltage Real Pulse Pack based on Frequency and Duty)
(G10-I (BIipolar Low Power Madulated Current Pulse Pack
BLP-I-MCPPF)- Symmetric BIipolar Low Power Madulated Current Pulse Pack based on Frequency )
BLP-I-MCPPD)- Symmetric BIipolar Low Power Madulated Current Pulse Pack based on Duty cycle )
BLP-I-MCPPFD)- Symmetric BIipolar Low Power Madulated Current Pulse Pack based on Frequency and Duty)
(G11-V ( Symmetric BIipolar Low Power Madulated Voltage Pulse Pack
BLP-MVPPF)- Symmetric BIipolar Low Power Madulated Voltage Pulse Pack based on Frequency )
BLP-MVPPD)- Symmetric BIipolar Low Power Madulated Voltage Pulse Pack based on Duty cycle )
BLP-MVPPFD)- Symmetric BIipolar Low Power Madulated Voltage Pulse Pack based on Frequency and Duty)